| title | ISBN-13 (ISBN-10) | year of publica- tion |
|---|---|---|
| Fabrication Engineering at the Micro- And Nanoscale | 978-0-19-532017-6 (0-19-532017-4) | 2008 |
| The Science and Engineering of Microelectronic Fabrication, 2nd Ed. | 978-0-19-513605-0 (0-19-513605-5) | 2001 |
A.C. · A. Campbell · S.A · S. A. Campbell · S. Campbell · Stephen A. · Stephen C. · Stephen Campbell