| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Semiconductor Micromachining: Fundamentals and Technology | 978-0-471-98084-1 (0-471-98084-6) | 1998 | |
| Semiconductor Micromachining: Fundamentals and Technology: Fundamental Electrochemistry and Physics v. 1 | 978-0-471-96681-4 (0-471-96681-9) | 1998 | H.J. Lewerenz |
A.C. · A. Campbell · S.A · S. Campbell · Stephen A. Campbell