M+M · Marc J. Madou · Marcia Muth · Mark Mathew · Mark Mathieu · Mark Moodie
| title | ISBN-13 | year of publica- tion |
|---|---|---|
| Applications of Microfabrication and Nanotechnology | 978-1-4200-5516-0 | 2009 |
| Fundamentals of Microfabrication and Nanotechnology, Third Edition | 978-0-8493-3180-0 | 2009 |
| Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition | 978-0-8493-0826-0 | 2002 |
| Manufacturing Techniques for Microfabrication and Nanotechnology | 978-1-4200-5519-1 | 2009 |
| Solid State Physics in Microfabrication and Nanotechnology | 978-1-4200-5511-5 | 2009 |