International Conference on Simulation and Design of Microsystems and

titleISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Simulation and Design of Microsystems and Microstructures978-1-56252-314-5
(1-56252-314-7)
1995A. Lahrmann · R. A. Adey

C.S. · I.C. · International Conference · O's

International Conference on Simulation o