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International Conference on Simulation and Design of Microsystems and
title
ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Simulation and Design of Microsystems and Microstructures
978-1-56252-314-5
(1-56252-314-7)
1995
A. Lahrmann · R. A. Adey
C.S.
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I.C.
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International Conference
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O's
International Conference on Simulation o