| title | ISBN-13 (ISBN-10) | year of publica- tion |
|---|---|---|
| Computational Semiconductor Processing: Lithography for an IC Dfm | 978-1-4200-6822-1 (1-4200-6822-9) | 2009 |
Frank Schallenberg · Frank Schellenberg · Frank Schulenberg · Frank Schulenburg · Frank Shallenberger