SPIE-International Society for Optical Engine
| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Materials and Device Characterization in Micromachining | 978-0-8194-2971-1 (0-8194-2971-6) | 1998 | Yuli Vladimirsky |
C.F. · C. Friedrich · C.R. · R. Friedrich