C.A. Mack

John Wiley & Sons

titleISBN-13
(ISBN-10)
year of publica-
tion
Fundamental Principles of Optical Lithography: The Science of Microfabrication978-0-470-01893-4
(0-470-01893-3)
2007

A. M. · C.M. · C. Mack · Chris A. MacK

C. A. Marchaj