CRC · SPIE-International Society for Optical Engine
| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Microlithography: Science and Technology, Second Edition | 978-0-8247-9024-0 (0-8247-9024-3) | 2007 | Kazuaki Suzuki |
| Optical Microlithography Xvii | 978-0-8194-5290-0 (0-8194-5290-4) | 2004 | |