A.M. Gue

A-G ยท A. M.

Elsevier Science

titleISBN-13
(ISBN-10)
year of publica-
tion
C, H, N and O in Si and Characterization and Simulation of Materials and Processes978-0-444-82413-4
(0-444-82413-8)
1996

A. M. Guenault