Characterization and Metrology for Ulsi Technology: 1998 International Conference (AIP Conference Proceedings, Vol. 449 With CD ROM)

by: D.G. Seiler · A.C. Diebold · W.M. Bullis · T.J. Shaffner · R. McDonald · E.J. Walters

American Institute of Physics · 1998

Hardcover

details (United States).

details (UK).

details (Canada).

details (Germany).

details (France).

ISBN: 978-1-56396-753-5

ISBN-10: 1-56396-753-7