[Piscataway, NJ] : IEEE, 2002

year of publicationISBNauthor(s)title
2001978-0-9651577-6-6Calif.)) International Symposium on Plasma Process-Induced Damage (6th : 2001 : MontereyInternational Symposium on Plasma and Process-Induced Damage: 1996-2001 Proceedings
978-0-9651577-8-0Terence Hook · Koji Eriguchi and Calvin T. Gabriel · editors · technical co-sponsors · AVS · IEEE/Electron Devices Society · Japanese Society of Applied Physics2002 7th International Symposium on Plasma- and Process-induced Damage June 5-7, 2002, Maui, Hawaii, USA