Miniaturized Systems With Micro-Optics and Micromechanics III: 26-27 January 1998, San Jose, California (Proceedings of Spie--the International Society for Optical Engineering, V. 3276.)

by: M. Edward Motamedi · Rolf Goring · Society of Photo-Optical Instrumentation Engineers

SPIE-International Society for Optical Engine · 1998

Ppb.

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ISBN: 978-0-8194-2715-1

ISBN-10: 0-8194-2715-2