MEMS: A Practical Guide to Design, Analysis, and Applications

See also (possibly by other authors):
2006Gebundene AusgabeMEMS. A Practical Guide to Design, Analysis, and Applications
Practical

by: Jan Korvink · Oliver Haber

William Andrew Publishing · 2005

Hardcover

ISBN: 978-0-8155-1497-8

ISBN-10: 0-8155-1497-2