Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices (NATO Science Series E: (closed))

by: O. Auciello · Jürgen Engemann Springer · 1993 Hardcover details (USA). details (United Kingdom). details (Canada). details (Germany). details (France). ISBN: 978-0-7923-2265-8 ISBN-10: 0-7923-2265-7