Microelectromechanical Systems, 1998 IEEE 11th International Workshop

by: Germany) IEEE Workshop on Micro Electro Mechanical Systems (11th : 1998 : Heidelberg · IEEE

Institute of Electrical & Electronics Enginee · 1998

Ppb.

details (USA).

details (UK).

details (Canada).

details (Germany).

details (France).

ISBN: 978-0-7803-4412-9

ISBN-10: 0-7803-4412-X