Ion Implantation Technology: 16th International Conference on Ion Implantation Technology; IIT 2006 (AIP Conference Proceedings / Accelerators, Beams, and Instrumentations)
by: Karen J. Kirkby · Russell M. Gwilliam · Andy Smith · David Chivers
American Institute of Physics · 2006
CD-ROM
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ISBN: 978-0-7354-0366-6
ISBN-10: 0-7354-0366-X