Ion Implantation into Semiconductors, Oxides and Ceramics: Proceedings of the E-MRS 1998 Spring Meeting Symposium J, Strasbourg, France, 16-19 June ... Research Society Symposia Proceedings)

by: B.G. Svensson · H.A. Atwater · J.K.N. Lindner · P.L.F. Hemment Hardcover details (UK). ISBN: 978-0-08-043613-5 ISBN-10: 0-08-043613-7 Elsevier Science · 1999