Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment (European Materials Research Society Symposia Proceedings)

by: H. Richter · P. Wagner · G. Ritter Elsevier Science · 1999 Hardcover details (UK). details (United States). details (Canada). details (Germany). details (France). ISBN: 978-0-08-043609-8 ISBN-10: 0-08-043609-9